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Vacuum process chamber:

1 stainless steel chamber

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Load-Lock:

1 set of independent manual Load-Lock chamber

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Pumping system:

Diffusion pump + Mechanical pump

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Vacuum gauge:

Full range vacuum gauge

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Flow control:

Mass flow controller

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Number of electron guns:

3 to 4 electron guns can be connected in parallel

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Filament current:

120A

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Electron beam current:

3A

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Ultimate vacuum:

5E-4Pa

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Temperature control range:

1200℃

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Uniform deposition area:

?500mm

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Coating uniformity:

±5%